< cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>激光系統(tǒng)> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>型號規(guī)格> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>LT7130> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>LT5110> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>LT> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>LT3100> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>激光波長> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>1064nm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>1064nm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>1064nm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>1064nm> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>激光功率> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>10W> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>10W> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>10W> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>10W> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>典型光斑尺寸> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>35±5μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>35±5μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>35±5μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>40±5μm> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>焦方式> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>動,計算程序控> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>動,計算程序控> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>動,計算程序控> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>動> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>冷卻方式> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>風冷> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>風冷> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>風冷> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>風冷> |
< cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>激光束定位系統(tǒng)> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>激光束運動范圍> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>60mm X 60mm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>60mm X 60mm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>60mm X 60mm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>100mm X 100mm> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>運動分辨率> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.76μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.76μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.76μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>1.5μm> |
< cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>重復定位精度> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±2.5μm> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±5μm> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±5μm> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±10μm> |
< cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>分步重復運動系統(tǒng)> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>運動方式> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>空氣懸浮運動,無擦力> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>精密閉環(huán)XY平臺> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>精密閉環(huán)XY平臺> | < cl=MoNorml tyle="MRGIN: 0cm 0cm 0t">&nb;> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>運動范圍> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>290mm*260mm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>300mm*300mm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>300mm*300mm> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>重復定位精度> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±1μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±5μm> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>±10μm> |
< cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>{zd0}運動速度(空載)> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>900mm/> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>180mm/> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>180mm/> |
< cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>測量系統(tǒng)> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>電阻測量方式> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>四線測量或二線測量> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>四線測量或二線測量> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>四線測量或二線測量> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>四線測量或二線測量> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>電阻測量精度> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>中阻 ± 0.02%> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>中阻 ± 0.05%> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>中阻 ± 0.05%> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>中阻 ± 0.05%> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>電阻測量范圍> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.1Ω-100MΩ> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.1Ω-100MΩ> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.1Ω-100MΩ> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>0.1Ω-100MΩ> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>測量速度> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>25μ/次> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>25μ/次> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>25μ/次> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>25μ/次> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>零點及滿程誤差校正> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>動校正> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>動校正> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>動校正> | < cl=MoNorml tyle="VERTICL-LIGN: middle; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>動校正> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>探針定義> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>可編程任意設定> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>可編程任意設定> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>可編程任意設定> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>可編程任意設定> |
< cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: left; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=left>探針板運動> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>動,計算程序控> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>動,計算程序控> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>動,計算程序控> | < cl=MoNorml tyle="VERTICL-LIGN: bottom; TEXT-LIGN: center; MRGIN: 0cm 0cm 0t; mo-gintion: widow-orhn" lign=center>氣缸驅動或動> |